Thin Film Deposition By Thermal Evaporation Method - VacCoat
The DTT is equipped with a Turbo Molecular Pump (TMP) and the ultimate pressure of the deposition chamber reaches to 7*10-7 Torr. Thermal evaporation deposition at this pressure creates thin film with good quality and performance. The Turbo Molecular Pump used in the system are supplied by Leybold, a Germany company.